Zeiss Supra Nabity E-beam

The Zeiss SUPRA 55 is a FESEM with a Schottky thermal field emission source. It has an ultimate imaging resolution in the range of 2nm. The SUPRA has multiple detectors for Secondary Imaging as well as Backscatter. The system has been setup with a blanker and a control system that can be used for doing electron beam lithography. The Nabity system is able to read standard CAD files, DFX, and GDSII formats. In e-beam lithography mode 20nm-50nm feature sizes are attainable.