The VERSA 3D Dual Beam combines scanning electron microscopy (SEM) and Focused Ion Beam (FIB) in a single platform that allows switching between two modes of operation. The samples can be milled via ion beam and deposited with platinum while observing the process. The milling and deposition processes can be performed on pre-adjusted patterns as well as externally provided patterns. In addition to secondary electron imaging, backscattered electron imaging is available where the two images can be combined to observe the contribution of each. The high and low vacuum modes enable users to work with a range of samples including uncoated and non-conductive samples. In addition, the environmental SEM (ESEM) mode allows electron beam imaging of naturally hydrated samples and supports in situ analysis and visualization at varying temperature and humidity conditions.
