CII 4155
Zonghuan Lu received a PhD degree in Chemical Engineering from Institute for Micromanufacturing, Louisiana Tech University. Beginning in 2007, he worked as a Research Associate at Rensselaer Polytechnic Institute. His primary research background includes MEMS/microfluidic developing, semiconductor micro- and nano- fabrication, process developing, integration, and characterization, and material research for microelectronic applications. He has authored 60+ peer-reviewed publications.
In October 2024, he joined cMDIS as a Semiconductor Process Engineer. His current responsibilities include supporting the NORDTECH toolset—covering e beam lithography, DRIE etching, sputtering and e beam evaporation, and scanning transmission electron microscopy—as well as assisting researchers with microfabrication process development.