Integrated Circuit Fabrication Laboratory - ECSE 6300/MTLE 6300

Theory and practice of IC fabrication in a research laboratory environment. Test chips are fabricated and the resulting devices and circuits evaluated. Processes and fabrication equipment studied and used include oxidation/diffusion, CVD reactors, photolithography, plasma etching, vacuum evaporator, ion implantation, etc. Instruments used in process monitoring and final testing include thin film profilometer, ellipsometer, resistivity probe, scanning electron microscope, capacitance-voltage system, etc. The fundamentals of hazardous material handling and clean room procedures are studied.

Scanning Electron and Ion Techniques - MTLE/cMDIS 6962

Scanning Electron and Ion Techniques is designed to provide the theory, applications and laboratory experience to enable the student to gain a strong working knowledge of materials characterization with finely focused electron and ion beams. This will be achieved by a series of in class lectures on electron- and ion-solid interactions, and resulting imaging, diffraction and spectroscopy methods, coupled with a series of four hands-on demos and laboratories in small groups. 

Transmission Electron Microscopy (TEM) - MTLE/cMDIS 6963

Transmission Electron Microscopy provides an overview of the fundamentals of transmission electron microscopy along with microscope operation.  This includes, but is not limited to microscope alignment (why and how it is done properly), fundamentals of diffraction, imaging and interpretation of the information represented within images, and an introduction to advanced TEM techniques such as elemental analysis etc.  This will be achieved by a series of in class lectures on transmission electron interactions, resulting imaging, diffraction and spectroscopy methods, and coupled with a series of four hands-on demos and laboratories in small groups.